PROPERTIES OF STANDARD FLUOROELASTOMERS

 
Description: Excellent resistance to petroleum products and solvents. Very good high-temperature performance. Fluorocarbon elastomers make up the most widely used seals in the semiconductor industry.y

Limitations: Avoid polar solvents, amines, anhydrous ammonia, SKYDROL, hydrazine and hot acids.

Chemistry: Copolymer of vinylidene fluoride and hexafluoropropylene, although many more exotic versions exist for improved chemical resistance or low temperature performance.

Trade Names: VITON, FLUOREL, TECHNOFLON, DAI-EL

ASTM D1418 Designation: FKM

ASTM D2000/SAE J200 Type, Class: HK

Typical Uses: Crystal Growth, Epitaxial Silicon, LPCVD/Oxidation, Coater/Developer, CVD, Dry Etch, Wet Etch, Cleaning, Resist Stripping, Ion Implant, PVD

Temperature Range: Ò40É to 200ÉC (Ò40É to 392ÉF)


ISC-FNGP
Compound
Color Hardness
(Shore A)
Tensile
Mpa (psi)
Elongation
(%)
70hr C/S
@200ÜC
Low
Temp
High
Temp
 
V75 Black 78 14.5
(2,100)
190 7 -25ÉC
(-13ÉF)
200ÉC
(392ÉF)
<<Select
 V60 Black 63 13.1
(1,900)
225 8 -25ÉC
(-13ÉF)
200ÉC
(392ÉF)
<<Select
V121 Black 75 13.6
(1,970)
240 13 -20ÉC
(-4ÉF)
200ÉC
(392ÉF)
<<Select
V176 Black 75 17.2
(2,490)
350 10 -20ÉC
(-4ÉF)
200ÉC
(392ÉF)
<<Select
V141 Black 79 15.7
(2,270)
230 29 -15ÉC
(5ÉF)
200ÉC
(392ÉF)
<<Select
V115 Black 75 15.0
(2,180)
185 10 -35ÉC
(-31ÉF)
200ÉC
(392ÉF)
<<Select
V123 Black 73 17.6
(2,550)
140 15 -35ÉC
(-31ÉF)
200ÉC
(392ÉF)
<<Select

 

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